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发明名称
METHOD OF FORMING COATINGS CONTAINING AMORPHOUS SILICON CARBIDE
摘要
申请公布号
CA2013478(A1)
申请公布日期
1990.10.12
申请号
CA19902013478
申请日期
1990.03.30
申请人
SHARP, KENNETH G.;TARHAY, LEO
发明人
SHARP, KENNETH G.;TARHAY, LEO
分类号
C01B31/36;C23C16/32;C23C16/511;H01L21/205;H01L21/314
主分类号
C01B31/36
代理机构
代理人
主权项
地址
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