发明名称 JOHATSUGENYOKATSUTAAKIKOTSUKIWAIYAAJOSHIRYOKYOKYUSOCHI
摘要 PURPOSE:To provide a titled supply device which permits sure supply or replenishment of a wire without clogging or hitching of the wire in a feed mechanism by supplying a material in the form of a wire and constituting integrally the feed mechanism and cutter mechanism thereof to one body. CONSTITUTION:A driving shaft 4 is driven by a driving motor 9 and a turning supporting base 18 is turned to a supply position facing an evaporating source 29 in a vacuum process device. A wire 22 is extended to a prescried length into the crucible of the source 29 by a chute 27 from a reel 21 via paired rollers 23a- 23c and a cutter mechanism 24. The blade member 25 of the mechanism 24 is thereafter actuated by a cutter actuator to cut the wire. The wire forward from the cut part is thereby dropped into the crucible. The top end of the wire 22 is retreated to the prescribed position by the mechanism 23 and the base 18 is returned again to the evacuation position. The supply or replenishment operation of the wire 22 to the crucible are executed in the above-mentioned way.
申请公布号 JPH0245699(B2) 申请公布日期 1990.10.11
申请号 JP19840051197 申请日期 1984.03.19
申请人 ULVAC CORP 发明人 INOE YOJI;NAWA HIROYUKI
分类号 C23C14/24 主分类号 C23C14/24
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