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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02251142(A)
申请公布日期
1990.10.08
申请号
JP19890073388
申请日期
1989.03.24
申请人
FUJIKURA LTD
发明人
NISHIMURA HITOSHI
分类号
H01L21/3063;H01L21/306
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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