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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH02248042(A)
申请公布日期
1990.10.03
申请号
JP19890067653
申请日期
1989.03.22
申请人
NEC CORP
发明人
TAKADO NOBUKAZU
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
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地址
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