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发明名称
PROCESS FOR FORMING AN ULTRAFINE-PARTICLE FILM
摘要
申请公布号
EP0265886(A3)
申请公布日期
1990.10.03
申请号
EP19870115669
申请日期
1987.10.26
申请人
HITACHI, LTD.
发明人
ARAYA, TAKESHI;MATSUNAWA, AKIRA;KATAYAMA, SEIJI;HIOKI, SUSUMU;HANEDA, MITSUAKI;OKADA, RYOJI TSUKUBA HAUSU 1-305
分类号
C23C14/24;C23C14/28;H01L39/24;(IPC1-7):B22F9/04
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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