发明名称 Method for producing amorphous silicon thin film transistor array substrate
摘要 A method for producing an amorphous silicon thin film transistor array substrate comprising successively coating a gate insulating layer, an amorphous silicon layer and a protective insulating layer on a glass substrate provided with a gate electrode and a gate wiring having a predetermined shape, in such a manner as to not cover the connecting terminal region of the gate wiring. A protective insulating layer is patterned into a predetermined shape. After passing through a predetermined production process to produce an amorphous silicon thin film transistor array, at least a gate wiring and a source wiring are provided. The step of paterning the protective insulating layer comprises covering the connecting terminals of the gate wiring and the exposed region of the glass substrate with a photoresist.
申请公布号 US4960719(A) 申请公布日期 1990.10.02
申请号 US19890300629 申请日期 1989.01.23
申请人 SEIKOSHA CO., LTD. 发明人 TANAKA, SAKAE;WATANABE, YOSHIAKI
分类号 H01L21/77;H01L21/84 主分类号 H01L21/77
代理机构 代理人
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