发明名称 CARRIER TRANSFER APPARATUS
摘要 <p>PURPOSE:To expand a freedom when a carrier is taken into a stocker and taken out from it by a constitution wherein, while the carrier is being supported from its lateral sides, it can be moved in a three-dimensional manner. CONSTITUTION:An air cylinder 36 is driven in a state that finger members 34, 35 of a hand unit 30 are faced on both sides of a carrier 1 to be transferred. Thereby, a piston rod 37 is displaced upward; link members 31, 33 are turned; the finger rods 34, 35 are approached, sandwich side faces 5, 6 of the carrier 1 and support the carrier 1 from its lateral directions. The hand unit 30 is moved while the finger members 34, 35 are maintained horizontally; the carrier 1 is transferred while it keeps a horizontal posture. When the air cylinder 36 is driven in a reverse direction, the piston rod 37 is moved downward; the link members 31, 32 are turned; the finger members 34, 35 are separated from each other; the carrier 1 is released from its sandwiched state.</p>
申请公布号 JPH02246135(A) 申请公布日期 1990.10.01
申请号 JP19890067103 申请日期 1989.03.17
申请人 FUJITSU LTD 发明人 SADAKATA TAKAYUKI;FUJIE NOBUO;SONODA HIROAKI
分类号 B65G1/04;H01L21/677;H01L21/68 主分类号 B65G1/04
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