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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02244769(A)
申请公布日期
1990.09.28
申请号
JP19890063954
申请日期
1989.03.17
申请人
NISSAN MOTOR CO LTD
发明人
UCHIYAMA MAKOTO
分类号
H01L21/3063;H01L21/306;H01L29/84
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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