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发明名称
FORMING METHOD OF FINE PATTERN
摘要
申请公布号
JPH02239613(A)
申请公布日期
1990.09.21
申请号
JP19890061675
申请日期
1989.03.13
申请人
SANYO ELECTRIC CO LTD
发明人
KOBAYASHI SHUNICHI
分类号
H01L21/306;H01L21/027;H01L21/28;H01L21/30
主分类号
H01L21/306
代理机构
代理人
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