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发明名称
ION SOURCE
摘要
申请公布号
JPH02239559(A)
申请公布日期
1990.09.21
申请号
JP19890062628
申请日期
1989.03.14
申请人
NISSIN ELECTRIC CO LTD
发明人
FUKUMARU FUMIO;MATSUNAGA KOJI
分类号
H01J27/02;H01J27/20;H01J37/06;H01J37/08
主分类号
H01J27/02
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