ION MILLING METHOD,申请号JP19890058125-传众专利搜索

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发明名称	ION MILLING METHOD
摘要
申请公布号	JPH02236810(A)	申请公布日期	1990.09.19
申请号	JP19890058125	申请日期	1989.03.10
申请人	TDK CORP	发明人	MATSUZAKI MIKIO
分类号	C23F4/00;G11B5/31;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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