发明名称 FORMATION OF FILM BY LOW-PRESSURE PLASMA THERMAL SPRAYING
摘要 PURPOSE:To form a film which is dense, has high adhesive strength and is hardly peelable by executing thermal spraying while blowing gas to the surface to be thermally sprayed at the time of forming the film by a low-pressure plasma thermal spraying on the surface to be thermally sprayed. CONSTITUTION:The inside of a hermetic vessel 2 installed with a plasma thermal spraying gun in the upper part is evacuated to a high vacuum and thereafter, the gaseous Ar is introduced in a low-pressure state into the vessel. An alloy of a specific desired compsn. is thermally sprayed under a low pressure by the plasma thermal spraying gun 1 to the surface 6 of the object 5 to be thermally sprayed, such as stainless steel sheet, via a masking plate 4 having an aperture 4a to form the thin film of the alloy on the surface of the object 5 to be thermally sprayed. Gas blowing nozzles 3 are provided between the masking plate 4 and the object 5 and the same gaseous Ar as the atmosphere gas is blown to the surface 6 of the object to be thermally sprayed in this case. The pressure of the gaseous Ar in the hermetic vessel 2 is maintained at a specified value by regulating a discharge valve 7. The fine powder and undissolved particles in the hermetic vessel 2 are blown off by the gaseous Ar from the nozzles 3. The thermally sprayed film which has no pores, is dense, has the high adhesive strength and does not peel is formed on the surface of the object 5.
申请公布号 JPH02228463(A) 申请公布日期 1990.09.11
申请号 JP19890047454 申请日期 1989.02.28
申请人 TOSHIBA CORP 发明人 ITO MASAYUKI;SUZUKI TAKAO;NAKABASHI MASAKO
分类号 C23C4/12 主分类号 C23C4/12
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