VAPOR GROWTH DEVICE,申请号JP19890043637-传众专利搜索

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发明名称	VAPOR GROWTH DEVICE
摘要
申请公布号	JPH02222722(A)	申请公布日期	1990.09.05
申请号	JP19890043637	申请日期	1989.02.22
申请人	MATSUSHITA ELECTRON CORP	发明人	MITSUI AKIRA
分类号	B01J3/02;C23C16/44;C30B25/14;H01L21/205;H01L21/31	主分类号	B01J3/02
代理机构		代理人
主权项
地址

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