| 摘要 |
PURPOSE:To prevent the generation of foreign matter due to the solidification of the remaining spent liq. by supplying a cleaning soln. to the tank, nozzle and opening of the main body from a cleaning soln. supply passage. CONSTITUTION:An opening 23 opposed to a part 10 to be supplied is provided to the main body 21, and the nozzle 27 is inserted into the opening 23 with the discharge part directed toward the part 10. Plural liq. supply passages 29A and 29B are connected to the tank 28 connected to the nozzle 27 to supply plural kinds of liqs. A cleaning soln. supply passage 32 is connected to supply the cleaning soln. to the tank 28. A cleaning soln. supply passage 24 is connected to supply the cleaning soln. to the opening 23 of the main body 21. Namely, the cleaning soln. is supplied to the tank, nozzle and opening of the main body, and the spent liq. remaining in the tank, nozzle and opening is cleaned off. Consequently, the generation of foreign matter due to the solidification of the remaining spent liq. is prevented. |
