METHOD FOR MANUFACTURING CUINSE2 THIN FILM BY VACUUM EVAPORATION OF DUAL COMPOUND

摘要

PURPOSE: A method for manufacturing a CuInSe2 thin film by vacuum evaporation of a dual compound is provided to form the CuInSe2 single layer for a high-efficiency solar cell which can be obtained by a conventional process like a three stage process using metal elements and a selenization process, by using a vacuum evaporation method regarding a Se-based dual compound like Cu2Se/In2Se3 and Se. CONSTITUTION: A Se-based dual compound like Cu2Se/In2Se3 and Se used as simultaneous evaporation materials are sequentially evaporated in a vacuum state of a vacuum evaporation chamber while the temperature of a substrate varies.