| 摘要 |
PURPOSE:To manufacture of large diameter of disk heater with little unevenness of the local temperature distribution by making the disk heater which has a resistor on the whole surface and electrodes at the periphery. CONSTITUTION:To a disk heater 1, a resistor 2 is provided evenly over the whole surface of the disk by coating in a filmy condition on the basic material 4. Electrodes 3A and 3B are provided at the periphery, and lead wire installing ports 4A and 4B are arranged. As a protective film of the resistor 2, an SiO membrane is used. As the basic material 4, a quartz used as an insulating material for a vacuum processing device and the like is used. As the resistor 2, SnO2 or ITO is suitable because the film coating is easy and an adequate resistance value 40OMEGA/square level can be obtained by them. By making such a disk heater, the unevenness of the temperature distribution can be reduced, and a large diameter of disk heater can be manufactured. Since the resistor 2, the basic material 4, and the protective film 5 can be composed of a transparent material, the disk heater 1 can be made transparent. |
