| 摘要 |
PURPOSE:To automatically adjust the focus of a laser beam by providing a focusing position detection sensor of the laser beam to a nozzle chip and providing a driving controller to move the nozzle chip based on the detected result. CONSTITUTION:The focusing position detecting sensor 86 detects the focusing position of the laser beam with which the inside of a nozzle main body 69 was irradiated and its result is transmitted to motor control parts 71 and 81 and based on this, driving motors 72 and 82 operate and the nozzle chip 19 is moved in the directions of X, Y and W and the focusing position of the laser beam is adjusted automatically so that it is fitted to the tip of the nozzle chip 19. This adjustment work is easily carried out in a short time. |
