ELECTRON RADIATION DEVICE AND MANUFACTURE THEREOF

摘要

PURPOSE:To select each suitable material and design an electron radiation device by energizing a thin membrane having particles to arrange the particles in a small gap portion of the thin membrane. CONSTITUTION:Formed on a substrate 4 is a thin membrane 3 made of a metal or a semiconductor. Particles are dispersed to be applied on the thin membrane 3. The particles 5 are arranged on the thin membrane 3 by sintering. Electrodes 1 and 2 are formed by piling up and forming a conductive metal at both ends of the thin membrane 3. When the electrodes 1 and 2 are energized, crack is produced in the center portion of the thin membrane 3 to form a small gap portion 6. Accordingly, an electron radiation device is obtained with the configuration in which the particles 5 are arranged in the small gap portion 6 as an electron radiation body. The electron radiation body for electron radiation and the small gap portion 6 of the thin membrane 3 applying high electrical field thereto are separated from each other with respect to their materials to select each suitable material and design the electron radiation device.