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发明名称
MANUFACTURE OF SUPERCONDUCTING CIRCUIT
摘要
申请公布号
JPH02181483(A)
申请公布日期
1990.07.16
申请号
JP19890001673
申请日期
1989.01.06
申请人
SHIMADZU CORP
发明人
NAGAMACHI SHINJI
分类号
C23C14/04;H01B12/06;H01B13/00;H01L39/24
主分类号
C23C14/04
代理机构
代理人
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地址
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