METHODS AND APPARATUS FOR MATERIAL DEPOSITION

摘要

Methods and apparatus for depositing thin films of complex (compound) materials, including ferroelectrics, superconductors, and materials with high dielectric constants by photo/plasma-enhanced chemical vapor deposition from stabilized compound sources. Multiple heating (10, 12) and/or spectral energy sources (8) are used for applying high energy, rapid thermal pulses in a precise timed sequence. Sol-gels of compound sources are ultrasonically atomized before being introduced to a deposition chamber (2).