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发明名称
APPARATUS FOR INSPECTING TEMPERATURE CHARACTERISTIC OF SEMICONDUCTOR CIRCUIT ELEMENT
摘要
申请公布号
JPH02179484(A)
申请公布日期
1990.07.12
申请号
JP19880334230
申请日期
1988.12.29
申请人
SHARP CORP
发明人
KURASAKI SHIGETAKE
分类号
G01R31/26;H01L21/822;H01L27/04
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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