| 摘要 |
PURPOSE:To make a piezoelectric ceramic miniaturized and lightweight and to hold down a burning temperature to be low by a method wherein a forming operation of a lead titanate zirconate layer is repeatedly executed using a solution which is prepared in such a manner that a titanium compound, a zirconium compound, and a lead compound are compounded together so as to make the composition ratio of each metal equal to that of lead titanate zirconate. CONSTITUTION:A liquid film is formed on a substrate 2 using a solution which contains a titanium compound, a zirconium compound, and a lead compound compounded to make a composition ratio of each metal equal to that of lead titanate zirconate. Then, the liquid film is dried up and thermally treated to form a lead titanate zirconate layer 1 on the substrate 2, and this forming operation is repeated to form two or more lead titanate zirconate layers 1 in lamination on the substrate 2. As a lead titanate zirconate layer formed on a substrate through a single operation is very small in thickness, only one layer of crystal layer is formed in a thicknesswise direction and in result the whole laminated layer becomes an aggregate of crystal excellent in orientation. By this setup, a piezoelectric ceramic of this design can be burned at a low temperature, made small and lightweight, and improved in performance. |
