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发明名称
ION IMPLANTATION APPARATUS
摘要
申请公布号
JPH02172152(A)
申请公布日期
1990.07.03
申请号
JP19880325848
申请日期
1988.12.26
申请人
HITACHI LTD;HITACHI INSTR ENG CO LTD
发明人
KOIKE HIDEMI;USAMI YASUTSUGU;YAMAUCHI TSUNEYOSHI
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
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