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发明名称
CLEANING OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH02164035(A)
申请公布日期
1990.06.25
申请号
JP19880321241
申请日期
1988.12.19
申请人
NEC CORP
发明人
TSUJI MIKIO
分类号
B08B3/08;H01L21/304
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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