摘要 |
PURPOSE:To cool a signal processing circuit by an immersion cooling method with a liquid having high cooling efficiency by discretely segmenting radiation sensors and the signal processing circuit and introducing a liquid refrigerant into the space including the signal processing circuit. CONSTITUTION:The radiation sensors 2 are disposed in an air chamber 5 in such a manner that the sensors are disposed below. The upper part and both the right and left side parts are coated with wall bodies 4. The wall body 4 is hermetically adhered to the ends of substrates 1, 1'. A liquid refrigerant inlet pipe 4a and outlet pipe 4b are provided on the wall body 4 and the liquid refrigerant can be passed into the space enclosed by the wall body 4 and the substrates 1, 1' by supplying the liquid refrigerant to the pipe 4a. The liquid refrigerant, such as perfluorocarbon, which is cooled by a heat exchanger 102 is introduced via a filter 103 by a pump 101 to the pipe 4a and the liquid refrigerant which deprives the signal processing circuit part of its heat at the time of passing the circuit part is again cooled by the exchanger 102 and is introduced into the pipe 4a.
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