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发明名称
TRENCH ISOLATION METHOD IN SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH02161730(A)
申请公布日期
1990.06.21
申请号
JP19880316917
申请日期
1988.12.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAKAGAMI KIYOSHI
分类号
H01L29/73;H01L21/331;H01L21/76
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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