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发明名称
PATTERN-HEIGHT CHECKING APPARATUS
摘要
申请公布号
JPH02162204(A)
申请公布日期
1990.06.21
申请号
JP19880316263
申请日期
1988.12.16
申请人
FUJITSU LTD
发明人
OKA KOJI;ANDO MORITOSHI
分类号
G01C3/06;G01B11/24;G01B11/245
主分类号
G01C3/06
代理机构
代理人
主权项
地址
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