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发明名称
METHOD AND DEVICE FOR LIGHT-EXCITED CVD
摘要
申请公布号
JPH02159376(A)
申请公布日期
1990.06.19
申请号
JP19880313590
申请日期
1988.12.12
申请人
BABCOCK HITACHI KK
发明人
ADAKA SABURO;SHIBATA KENJI;YUASA HIROSHI
分类号
C23C16/40;C23C16/48
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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