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发明名称
INSPECTION DEVICE
摘要
申请公布号
JPH02154192(A)
申请公布日期
1990.06.13
申请号
JP19880307907
申请日期
1988.12.07
申请人
TOKYO ELECTRON LTD
发明人
KOMIYAMA MASAHIKO
分类号
G01B11/24;G01B21/00;G01N21/84;G02B21/24;G02B21/26;G12B5/00;H01L21/66
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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