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发明名称
VERFAHREN ZUR ALLSEITIGEN UMHUELLUNG VON HALBLEITERBAUELEMENTEN
摘要
申请公布号
DD279114(A1)
申请公布日期
1990.05.23
申请号
DD19880324501
申请日期
1988.12.30
申请人
TU DRESDEN DIREKT. FORSCH.,DD
发明人
WEBER,HELMUT,DD;FROEMMEL,ANDREAS,DD
分类号
H01L21/48;(IPC1-7):H01L21/48
主分类号
H01L21/48
代理机构
代理人
主权项
地址
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