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发明名称
ELECTRON BEAM DRAWING APPARATUS
摘要
申请公布号
JPH02134810(A)
申请公布日期
1990.05.23
申请号
JP19880287665
申请日期
1988.11.16
申请人
HITACHI LTD
发明人
HAYAKAWA HAJIME;NAKAMURA KAZUMITSU
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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