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发明名称
OHMISCHE KONTAKTE FUER WASSERSTOFF ENTHALTENDES AMORPHES SILIZIUM.
摘要
申请公布号
DE3577250(D1)
申请公布日期
1990.05.23
申请号
DE19853577250
申请日期
1985.07.11
申请人
XEROX CORP., ROCHESTER, N.Y., US
发明人
NEMANICH, ROBERT JOHN, CUPERTINO CALIFORNIA 95014, US;THOMPSON, MALCOLM JAMES, PALO ALTO CALIFORNIA 94303, US
分类号
H01L31/04;H01L21/28;H01L21/285;H01L29/40;H01L29/45;H01L31/10;(IPC1-7):H01L31/02;H01L31/18;H01L21/205
主分类号
H01L31/04
代理机构
代理人
主权项
地址
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