| 摘要 |
PURPOSE:To make it possible to use an apparatus continuously for a long time by arranging a protecting case having an opening part through which the particles of the same material as a material for forming a thin film on the surface of a substrate are inputted in a space in the vicinity of the substrate in a vacuum chamber. CONSTITUTION:A protecting case 21 is arranged in a space in the vicinity of a substrate 2 in a vacuum chamber 1. An opening part 22 through which the particles of the same material as a material for forming a thin film on the surface of the substrate 2 are inputted is provided at a part of the case. A rotary body 31 is arranged in the case 21 so as to cover the opening part 22 of the case 21 and so that the gap between the body and the wall of the case 21 becomes small. The particles of the material which is inputted through the opening part 22 are attached to a part, and a thin film is formed. An optical means 51 projects light on the thin film which is attached and formed on a part of the rotary body 31. The reflected spectrum of the light from the thin film is measured. Therefore, the particles of the same material as the material for forming the thin film on the surface of the substrate, which are inputted through the opening part 22, are not turned into the inside of the case 21. The particles are attached to a part of the rotary body 31 which is rotated with a rotary mechanism 42, and the thin film is formed. The spectrum of the reflected light is measured by the means 51. |
