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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH02130911(A)
申请公布日期
1990.05.18
申请号
JP19880283907
申请日期
1988.11.11
申请人
NISSAN MOTOR CO LTD
发明人
UCHIYAMA MAKOTO;NOJIRI HIDETOMO
分类号
H01L21/20;H01L21/02;H01L21/329
主分类号
H01L21/20
代理机构
代理人
主权项
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