发明名称 MARK DETECTOR FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To exactly position a mark in a short period of time by executing the remaining mark positioning after subtracting the horizontal projection data of the mark necessary for a pre-treatment from the entire horizontal projection data. CONSTITUTION:The title device consists of the marking range horizontal projection formation part 9 of a range to be specified by a marking range storage part 8, a data operation part 10, the horizontal projection formation part of the mark 14 to be positioned by a mark position detection part 13, a horizontal projection data storage part 15 to store the data of the data operation part 10, the top and bottom end detection part of a mark column 16, mark position detection part for every columns 17, etc. The position of a separate symbol is detected with the use of inspection data; the projection data of only the separate symbol are obtained based on the position information; and after the data are made into the projection data of only a row or a column by subtracting from the projection data of the entire mark, the position of each symbol is detected. Thus, the position of the mark of a complicated arrangement can exactly be obtained in a short period of time.
申请公布号 JPH02122385(A) 申请公布日期 1990.05.10
申请号 JP19880277986 申请日期 1988.11.01
申请人 MITSUBISHI ELECTRIC CORP 发明人 SATO HAJIME;KIMURA YORIAKI;MORINAGA KAZUNORI
分类号 G06K9/20;G06K7/10;H01L21/027;H01L21/30 主分类号 G06K9/20
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