| 摘要 |
<p>PURPOSE:To perform easily a modification of the number of times of treatment end the like in case a treatment of the same kind is performed on substrates a plurality of times and to eliminate the need to give a mark pattern to the substrates by a method wherein the number of times of setting treatment of each substrate and the total number of times of output of a treatment completion signal are compared with each other and when the value of the total number of times of output is smaller than that of the number of times of setting treatment, change-over transfer mechanisms are set in a through state and when the total number of times of output is coincided with the number of times of setting treatment, the change-over transfer mechanism on one side is set in a stored state. CONSTITUTION:If a substrate is detected by a substrate detector 43, the number DS of times of setting treatment of the substrate and the total number DP of times of output of a treatment completion signal are read out from an ID memory 47, '1' is added to the value of the total number of times of output and the added value is replaced with the former DP value. Moreover, whether the newly replaced DP value is coincided with the number DS or not is decided. In case the DP value is not coincided with the DS value, that is, in case the DP value is smaller than the DS value, a loader 11 and an unloader 15 are set in a through state. If it is decided that the total number DP is coincided with the number DS, the unloader 15 is set in a stored state. Subsequently, the substrates are discharged from a buffer 14 to the unloader 15 on the basis of a pinciple of first in, first out.</p> |
