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发明名称
摘要
申请公布号
JPH0256439(U)
申请公布日期
1990.04.24
申请号
JP19880135214U
申请日期
1988.10.17
申请人
发明人
分类号
H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/52
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