MICROWAVE PLASMA DEVICE,申请号JP19880257566-传众专利搜索

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发明名称	MICROWAVE PLASMA DEVICE
摘要
申请公布号	JPH02103845(A)	申请公布日期	1990.04.16
申请号	JP19880257566	申请日期	1988.10.13
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	MUKAI YUJI;TSUDA YOSHIYUKI;KODERA KOICHI;YASUI HIDEAKI
分类号	H01J27/16;H01J37/08;H01L21/302;H01L21/3065	主分类号	H01J27/16
代理机构		代理人
主权项
地址

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