SIDE-WALL DOPING FOR TRENCH ISOLATION,申请号EP19860402221-传众专利搜索

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发明名称	SIDE-WALL DOPING FOR TRENCH ISOLATION
摘要
申请公布号	EP0220108(A3)	申请公布日期	1990.04.11
申请号	EP19860402221	申请日期	1986.10.07
申请人	THOMSON COMPONENTS-MOSTEK CORPORATION	发明人	CHAN, TSIU C.;HAN, YU-PIN
分类号	H01L21/76;H01L21/225;H01L21/265;H01L21/763;(IPC1-7):H01L21/76	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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