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发明名称
FILM FORMING DEVICE AND ETCHING DEVICE
摘要
申请公布号
JPH0297671(A)
申请公布日期
1990.04.10
申请号
JP19880247444
申请日期
1988.10.03
申请人
SUGITA TOSHIO;MORINUSHI YOSHINOBU;HANAJIMA SHIGEHARU
发明人
SUGITA TOSHIO;MORINUSHI YOSHINOBU;HANAJIMA SHIGEHARU
分类号
C23C14/34;C23F4/00
主分类号
C23C14/34
代理机构
代理人
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地址
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