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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0294556(A)
申请公布日期
1990.04.05
申请号
JP19880244496
申请日期
1988.09.30
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
KENMOCHI MASAHITO
分类号
H01L29/73;H01L21/20;H01L21/331;H01L21/8249;H01L27/06
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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