发明名称 TABLE SLIDING MECHANISM UNIT
摘要 PURPOSE:To make accurate positioning possible, by a method wherein rams of two air cylinders are disposed to face each other, while said rams are arranged to be projectable in the sliding direction of a table, and the table is provided with a means which is selectively engaged with said cylinders. CONSTITUTION:For positioning a table 5 at the position F, a change-over valve is driven to retreat rams 6a and 7a of cylinders so as to bring engaging blocks 9A and 9B in touch with stoppers 10A and 11A. By this, grooves 9e are aligned facing each other. A change-over valve of a plunger 15a of a selected cylinder 15 for a table 5 is driven to forward a block 12 in the direction C or D so as to engage the block 12 with the grooves 9e. Thus, the table 5 is positioned. For sliding the table 5 to the position E, the block 12 is moved in the direction C to engage with the block 9A, then the valve is switched to project the ram 6a in the direction A, and the ram 7a in B. The table 5 slides on rails 3 through the block 12 to the position E where the block 9A abuts on the stopper 10B to stop and position the table 5. The sliding and positioning of the table 5 from the position F to G can be performed in the same manner. Thus, the table can be slided quickly, keeping high positioning accuracy.
申请公布号 JPS5896740(A) 申请公布日期 1983.06.08
申请号 JP19810194911 申请日期 1981.12.03
申请人 FUJITSU KK 发明人 TAKADA MASASHI
分类号 B65G25/06;B23Q1/00;B23Q1/28;B23Q5/26;B23Q16/04;B65G25/00;H01L21/60;H01L21/68 主分类号 B65G25/06
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