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经营范围
发明名称
MASK FOR ION IMPLANTATION
摘要
申请公布号
JPH0279424(A)
申请公布日期
1990.03.20
申请号
JP19880230810
申请日期
1988.09.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
MOTONAMI KAORU
分类号
H01L21/266
主分类号
H01L21/266
代理机构
代理人
主权项
地址
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