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发明名称
VACUUM DEPOSITION METHOD
摘要
申请公布号
JPH0277577(A)
申请公布日期
1990.03.16
申请号
JP19880228257
申请日期
1988.09.12
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
INOUE ISAMU;ANDO TOMOAKI;SHINTAKU HIDENOBU;SUZUKI SHIGEO
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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