| 摘要 |
PURPOSE:To set the moving region of an alignment unit and a screen size to minimum limits, and to increase the mounting region of other component by setting the length of a direction perpendicular to and parallel to the edge of a blade to a predetermined length in response to maximum/minimum exposure screen angle. CONSTITUTION:The length of a blade BLD in a direction perpendicular to an edge for specifying the screen of the blade is increased slightly larger than (lEX-lmin)/2, where lEX is the direction of a screen sufficiently necessary to radiate at the maximum exposure screen angle, and lmin is the length of the minimum exposure screen angle. The length of the blade BLD of a direction along the edge is slightly increased larger than lmax+lSTG, where lSTG is the distance of an alignment unit AAU for detecting the deviation of an alignment mark on a wafer and an alignment mark AMK on a mask MSK moving in a direction along the edge, and lmax is the maximum exposure screen angle of this aligner. Thus, the moving region and screen size of the unit AAU are minimized to increase the mounting region of other components. |
