| 摘要 |
PURPOSE:To stably form U-shaped grooves having a specified groove shape regardless of the difference in developing conditions by calculating the intensity ratio of 1st order light with respect to the zero order light of diffraction as a development monitor value and stopping development at the point of the time when this value attains the max. value. CONSTITUTION:The groove structure of the grooves 4 acts as a diffraction grating and the zero order diffracted light 10 and the 1st order diffracted light 11 are generated when a recorded master disk 1 is irradiated with He-Ne laser light 9 for irradiation from a He-Ne laser light source 8 perpendicularly to the recording surface from a substrate 2 side. The diffracted light of second order, 3rd order... m-th order is generated as well. The intensity I0 of the zero order diffracted light 10 is detected by a photoelectric element 12 and the intensity I1 of the 1st order diffracted light by a photoelectron element 13 at this time. The shape and size of the grooves 4 change gradually according to the development progression of the recorded master disk 1. As a result, the development monitor value I1/I0 changes as well according to the progression of the development. The development is stopped at the point of the time when the development monitor value attains the max. value. The grooves having the desirable U-shaped sectional shape of the specified shape are obtd. in this way regardless of the shapes, etc., of the photoresist. |
