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发明名称
INTERFEROMETER
摘要
申请公布号
JPH0267935(A)
申请公布日期
1990.03.07
申请号
JP19880221183
申请日期
1988.09.02
申请人
JEOL LTD
发明人
ISHIHAMA TAKASHI
分类号
G01B9/02;G01J3/45;G01J9/02
主分类号
G01B9/02
代理机构
代理人
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