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经营范围
发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH0251500(A)
申请公布日期
1990.02.21
申请号
JP19880201193
申请日期
1988.08.12
申请人
NEC CORP
发明人
OGOSHI TAKAYUKI
分类号
C30B31/22
主分类号
C30B31/22
代理机构
代理人
主权项
地址
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