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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0245958(A)
申请公布日期
1990.02.15
申请号
JP19880196493
申请日期
1988.08.06
申请人
SEIKO EPSON CORP
发明人
KATO JURI;YOKOYAMA KENJI
分类号
H01L21/3205;H01L21/28;H01L21/768;H01L23/52;H01L23/522
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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