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发明名称
VERFAHREN ZUR AUSBILDUNG OHMSCHER KONTAKTE AUF N-TYP-SILIZIUM MIT NIEDRIGER DOTIERUNGSKONZENTRATION
摘要
申请公布号
DD276180(A1)
申请公布日期
1990.02.14
申请号
DD19880320526
申请日期
1988.10.06
申请人
VEB WERK FUER FERN SEHELEKTRONIK,DD
发明人
KUNKEL,REINHARD,DD;LABRENZ,HERRMANN,DD;SZCZYPIOR,HORST,DD;RIES,DIETMAR,DD;MUNTE,HANS-JOACHIM,DD
分类号
H01L21/285;(IPC1-7):H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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